In industrial engineering, a gaseous, vaporous, fluid or shapeless solid material that plays an active role in manufacturing processes, comparable to that of a tool. Jump to: navigation, search Industrial engineering is the engineering discipline that concerns the design, development, improvement, implementation and evaluation of integrated systems of people, knowledge, equipment, energy, and material. ... Jump to: navigation, search This article needs to be cleaned up to conform to a higher standard of quality. ...
Examples: A processing medium for washing is a soap solution, a processing medium for steel melting is a plasma, and a processing medium for steam drying is superheated steam.
Apparatus for floating gaseous transport and processing of substrates as in claim 16, wherein the beams are fed through electrostatic scanning means to obtain flat beams with a width in the direction of movement of said substrates which is smaller than the length of the processing chambers intermediate transporter segment packages.
Apparatus for floating transport and processing of substrates as in claim 19, wherein the cover of said processing module is made of microwave absorbent material such that openings are restricted to passing through of microwaves from the generator towards the processing chambers intermediate the transporter segment packages.
Apparatus for floating gaseous transport and processing of substrates as in claim 39, wherein within said processing chamber the distance between the sidewalls of the cabin is greater than the width of the substrates and a communication compartment is located interconnecting the processing side of the module with the non-processing side.
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